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US 12,516,963 B2Granted
Method for determining a position of a mirror
AssigneeCarl Zeiss SMT GmbH
InventorMichael Patra
Life of this patent
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Abstract
A method for determining a position of a mirror of an optical system comprises: a) providing at least one parameter from a mechanical model of the mirror; b) interferometrically detecting a temporal change in a distance of a point of a curved mirror effective surface; and c) ascertaining an amplitude and a phase of N eigenmodes from the temporal change in the distance and the at least one parameter to determine the position of the mirror.
Claims20
A method, comprising:
- a) interferometrically detecting a temporal change of a distance of a point on a curved used mirror surface of a mirror in an optical system;
- and
- b) determining a pose of the mirror by ascertaining an amplitude and a phase of eigenmodes from the temporal change of the distance and a parameter from a mechanical model of the mirror.
Dependencies are inferred from the claim text.