F17C 2225/038
Subatmospheric pressure
F17C2225/038 (Subatmospheric pressure) appears on 21 US grants and 27 published applications in this corpus.
Search patents in F17C- Granted patents
- 21
- Published applications
- 27
- Assignees
- 12
- Inventors
- 47
- Latest grant
- 28 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 1 | 0 |
| 2003 | 0 | 2 |
| 2004 | 0 | 2 |
| 2005 | 1 | 3 |
| 2006 | 2 | 1 |
| 2007 | 1 | 0 |
| 2008 | 2 | 0 |
| 2009 | 1 | 1 |
| 2010 | 1 | 2 |
| 2011 | 1 | 1 |
| 2012 | 1 | 1 |
| 2013 | 1 | 0 |
| 2014 | 0 | 1 |
| 2015 | 0 | 0 |
| 2016 | 0 | 1 |
| 2017 | 1 | 1 |
| 2018 | 1 | 4 |
| 2019 | 0 | 0 |
| 2020 | 1 | 1 |
| 2021 | 1 | 3 |
| 2022 | 1 | 1 |
| 2023 | 1 | 0 |
| 2024 | 2 | 1 |
| 2025 | 0 | 1 |
| 2026 | 1 | 0 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Processing apparatus and gas supply method28 Apr 2026US 12,613,005 B2Tokyo Electron Limited
- Vacuum supply gas cylinder10 Sep 2024US 12,085,230 B2
- Processing apparatus and gas supply method30 Apr 2024US 11,971,144 B2Tokyo Electron Limited
- Leak-proof fluid dispensing system with pressure sensor and adjustable dispensing regulator, dispensing control valve structure with pressure sensor, and dispensing control valve structure7 Mar 2023US 11,598,488 B2Ion Electronic Materials Co., Ltd.
- Dense fluid recovery and supply pressure sensing system20 Sep 2022US 11,448,366 B2
- Prpressure sensing unitary device16 Jan 2025US 2025/0020283 A1Entegris, Inc.
- Processing apparatus and gas supply method6 Jun 2024US 2024/0183498 A1Tokyo Electron Limited
- Processing apparatus and gas supply method15 Sep 2022US 2022/0290814 A1Tokyo Electron Limited
- Dense fluid recovery and supply pressure sensing system28 Oct 2021US 2021/0332949 A1
- Process and apparatus for dispensing gas from a storage vessel11 Mar 2021US 2021/0071818 A1NuMat Technologies, Inc.
Most cited
By later US patents
- Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases23US 6,857,447 B2Advanced Technology Materials, Inc. · 2005
- Closure for a pressure vessel and method17US 7,036,674 B2Robbins & Myers Energy Systems L.P. · 2006
- Closure for a pressure vessel and method15US 7,051,897 B2Robbins & Myers Energy Systems L.P. · 2006
- Closure for a pressure vessel and method15US 7,341,161 B2Robbins & Myers Energy Systems L.P. · 2008
- Sealed container14US 6,390,318 B1Denso Corporation · 2002