F16C 2380/18
Handling tools for semiconductor devices
F16C2380/18 (Handling tools for semiconductor devices) appears on 17 US grants and 25 published applications in this corpus.
Search patents in F16C- Granted patents
- 17
- Published applications
- 25
- Assignees
- 21
- Inventors
- 49
- Latest grant
- 27 May 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2003 | 0 | 1 |
| 2004 | 0 | 0 |
| 2005 | 1 | 1 |
| 2006 | 0 | 0 |
| 2007 | 1 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 1 |
| 2010 | 0 | 0 |
| 2011 | 1 | 1 |
| 2012 | 0 | 1 |
| 2013 | 0 | 0 |
| 2014 | 1 | 4 |
| 2015 | 2 | 0 |
| 2016 | 1 | 0 |
| 2017 | 0 | 1 |
| 2018 | 2 | 3 |
| 2019 | 2 | 2 |
| 2020 | 3 | 3 |
| 2021 | 2 | 0 |
| 2022 | 0 | 0 |
| 2023 | 0 | 1 |
| 2024 | 0 | 1 |
| 2025 | 1 | 3 |
| 2026 | 0 | 2 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Magnetic bearing device and positioning system27 May 2025US 12,313,120 B2Physik Instrumente (Pi) GmbH & Co. KG
- Active aerostatic bearing11 May 2021US 11,002,313 B2Etel S.A.
- Two degree-of-freedom nano motion control and positioning stage with parallel flexure hinge mechanism23 Feb 2021US 10,926,366 B2
- Aerostatic bearing6 Oct 2020US 10,794,423 B2Etel S.A.
- Rotation mechanism, machine tool, and semiconductor manufacturing device29 Sep 2020US 10,788,076 B2Nsk Ltd.
- Rotary joint arrangement and positioning device comprising the rotary joint arrangement and a linear guide device2 Jul 2026US 2026/0185556 A1Schneeberger Holding AG
- Device for holding, positioning and/or moving an object in a vacuum18 Jun 2026US 2026/0173804 A1VACOM Vakuum Komponenten & Messtechnik GmbH
- Sealed rolling bearing18 Sep 2025US 2025/0290548 A1Ntn Corporation
- Bracket, inspection device, and method of manufacturing bracket29 May 2025US 2025/0172173 A1Yokowo Co., Ltd.
- Magnetic suspension device and semiconductor processing apparatus1 May 2025US 2025/0137489 A1Suzhou Supermag Intelligent Technology Co., Ltd
Most cited
By later US patents
- Linear motion device, rolling device and separator for rolling device10US 6,854,351 B2Nsk Ltd. · 2005
- 360 static/hinge structure with deformable parts5US 10,013,022 B1Dell Products L. P. · 2018
- Liner motion device, rolling device and separator for rolling device4US 7,188,542 B2Nsk Ltd. · 2007
- Gas bearing assembly for an EUV light source3US 9,422,978 B2KLA-Tencor Corporation · 2016
- Gas floated workpiece supporting apparatus and noncontact workpiece support method1US 10,147,625 B2The Japan Steel Works, Ltd. · 2018