Two degree-of-freedom nano motion control and positioning stage with parallel flexure hinge mechanism

A nano positioning stage comprising two driving systems respectively arranged along an X axis and a Y axis, a moving stage, a parallel flexure hinge mechanism and a base frame;

• wherein each of the driving systems comprises a piezo actuator, a connecting block, a lever, a preloading spring, a push rod and a plurality of connecting hinges;
• the piezo actuator is fixed on the base frame at one end and connected with the connecting block at the other end;
• the lever is connected between the connecting block and the preloading spring;
• the connecting block is connected with the lever through one of the connecting hinges;
• the preloading spring is fixed on the base frame at one end and connected with the lever at the other end, and the lever is connected with the base frame through another one of the connecting hinges;
• the push rod is respectively connected with the lever and the moving stage through two of the connecting hinges which are disposed at two ends of the push rod;
• the moving stage is connected with the base frame by the parallel flexure hinge mechanism;
• when the piezo actuator is elongated, an action force is transferred to the moving stage through the connecting block, the lever and the push rod, so as to drive the moving stage to move in an axial positive direction while the preloading spring is compressed;
• and when the piezo actuator is shortened, the preloading spring provides a restoring force to the lever, so as to drive the moving stage to move in an axial negative direction.