C23C 2/52

With means for measuring or sensing

Official title: {with means for measuring or sensing}

C23C2/52 (With means for measuring or sensing) appears on 119 US grants and 135 published applications in this corpus.

Search patents in C23C
Granted patents
119
Published applications
135
Assignees
69
Inventors
349
Latest grant
6 Oct 2026

Filings by year

C23C 2/52: granted patents and published applications per publication year
YearGranted patentsPublished applications
197610
197700
197800
197900
198000
198100
198200
198300
198400
198500
198600
198700
198810
198900
199000
199110
199200
199310
199410
199500
199610
199710
199800
199910
200030
200140
200221
200303
200412
200523
200612
200713
200825
200913
201035
201127
201224
201326
201466
201566
201686
2017811
201866
201996
202044
202159
202256
202377
202478
2025610
202686

By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.

Subgroups

Granted patents

Recent patents

Most cited

By later US patents