C23C 10/52

More than one element being diffused in one step

Official title: more than one element being diffused in one step

C23C10/52 (More than one element being diffused in one step) appears on 144 US grants and 107 published applications in this corpus.

Search patents in C23C
Granted patents
144
Published applications
107
Assignees
90
Inventors
289
Latest grant
11 Nov 2025

Filings by year

C23C 10/52: granted patents and published applications per publication year
YearGranted patentsPublished applications
1976100
197710
197820
197950
198010
198140
198230
198310
198410
198510
198600
198720
198800
198950
199050
199120
199200
199300
199410
199510
199650
199710
199830
199930
200030
200120
200262
200395
200422
200514
200646
200714
200838
2009310
2010611
201126
201242
201363
201453
201537
201623
201735
201864
201904
202035
202132
202213
202334
202412
202551
202601

By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.

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