C01B 33/043
Monosilane
Official title: {Monosilane}
C01B33/043 (Monosilane) appears on 90 US grants and 56 published applications in this corpus.
Search patents in C01B- Granted patents
- 90
- Published applications
- 56
- Assignees
- 54
- Inventors
- 217
- Latest grant
- 19 Dec 2023
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 2 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 5 | 0 |
| 1984 | 1 | 0 |
| 1985 | 3 | 0 |
| 1986 | 7 | 0 |
| 1987 | 5 | 0 |
| 1988 | 6 | 0 |
| 1989 | 5 | 0 |
| 1990 | 4 | 0 |
| 1991 | 3 | 0 |
| 1992 | 4 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 1 |
| 2003 | 0 | 0 |
| 2004 | 0 | 6 |
| 2005 | 3 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 1 |
| 2008 | 1 | 1 |
| 2009 | 1 | 2 |
| 2010 | 0 | 4 |
| 2011 | 4 | 6 |
| 2012 | 1 | 9 |
| 2013 | 6 | 8 |
| 2014 | 4 | 3 |
| 2015 | 5 | 4 |
| 2016 | 8 | 3 |
| 2017 | 2 | 1 |
| 2018 | 1 | 1 |
| 2019 | 1 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 3 |
| 2022 | 0 | 0 |
| 2023 | 3 | 1 |
| 2024 | 0 | 1 |
| 2025 | 0 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Method for producing chlorosilanes19 Dec 2023US 11,845,667 B2Wacker Chemie AG
- Amorphous silicon-based films resistant to crystallization28 Nov 2023US 11,827,514 B2APPLIED Materials.Inc.
- Nano-wire growth4 Apr 2023US 11,618,970 B2Silcotek Corp.
- Column and process for disproportionation of chlorosilanes into monosilane and tetrachlorosilane and plant for production of monosilane20 Aug 2019US 10,384,182 B2Schmid Silicon Technology GmbH
- Solid source and method for the synthesis of silicon-containing precursors for chemical vapor deposition17 Apr 2018US 9,944,532 B2Socpra—Science Et Genie, S.E.C.
- Silane recovery device and method18 Dec 2025US 2025/0382186 A1SK Corporation
- Method and system for selective recovery of monochlorosilane and dichlorosilane in polysilicon production process6 Jun 2024US 2024/0182497 A1Advanced Material Solutions, LLC
- Process for manufacturing silicon-containing materials28 Dec 2023US 2023/0416907 A1Wacker Chemie AG
- Method for producing chlorosilanes3 Jun 2021US 2021/0163302 A1Wacker Chemie AG
- Amorphous silicon-based films resistant to crystallization6 May 2021US 2021/0130174 A1APPLIED Materials.Inc.
Most cited
By later US patents
- Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor81US 5,151,395 ANovapure Corporation · 1992
- High purity silane and silicon production55US 4,676,967 AUnion Carbide Corporation · 1987
- Process for the production of ultrahigh purity silane with recycle from separation columns45US 4,340,574 AUnion Carbide Corporation · 1982
- Gas separation by semi-permeable membranes38US 4,941,893 AUnion Carbide Chemicals and Plastics Company Inc. · 1990
- Waste treatment in silicon production operations37US 4,519,999 AUnion Carbide Corporation · 1985