Solid source and method for the synthesis of silicon-containing precursors for chemical vapor deposition
AssigneeSocpra—Science Et Genie, S.E.C.
InventorsMihai Scarlete, Cetin Aktik
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Abstract
The present document described a solid source and a method for synthesis of silicon-containing precursors for chemical vapor deposition. The solid source comprises a solid polysilane; an energy coupling agent distributed in the solid polysilane; and hydrogen, mixed with the solid polysilane and the energy coupling agent distributed in the solid polysilane, in a necessary amount to satisfy a hydrogen deficiency during a hydrogenolysis reaction.
Claims21
A solid source for synthesis of silicon-containing precursors for chemical vapor deposition, the solid source comprising:
- a solid polysilane;
- an energy coupling agent distributed in the solid polysilane;
- and
- hydrogen, mixed with the solid polysilane and the energy coupling agent distributed in the solid polysilane, in a necessary amount to satisfy a hydrogen deficiency during a hydrogenolysis reaction.
A method for synthesis of a solid source for the production of silicon-containing precursors for vapor chemical deposition, the method comprising:
- mixing a solid polysilane and an energy coupling agent distributed in the solid polysilane with a necessary amount of hydrogen to satisfy a hydrogen deficiency during a hydrogenolysis reaction.
Dependencies are inferred from the claim text.