Waste treatment in silicon production operations
AssigneeUnion Carbide Corporation
InventorsLarry M. Coleman, William Tambo
Life of this patent
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Abstract
A battery of special burners, each adapted for the treatment of a particular range of waste material formed during the conversion of metallurgical grade silicon to high purity silane and silicon, is accompanied by a series arrangement of filters to recover fumed silica by-product and a scrubber to recover muriatic acid as another by-product. All of the wastes are processed, during normal and plant upset waste load conditions, to produce useful by-products in an environmentally acceptable manner rather than waste materials having associated handling and disposal problems.
Claims5
A process for the enhanced disposal of gaseous and liquid wastes formed during the hydrogenation of metallurgical grade silicon and silicon tetrachloride to produce chlorsilanes, primarily trichlorosilane, disproportionation of such chlorosilanes to produce high purity silane and silicon tetrachloride, and decomposition of said silane in a free space reactor or fluid bed reactor to produce high purity silicon and by-product hydrogen, wherein said wastes are present as a light gas waste including silane and hydrogen, a heavy gas waste including mono, di and trichlorosilane, and a liquid waste including silicon tetrachloride, said process comprising:
- (a) separately collecting the light gas waste, heavy gas waste and liquid waste formed in such production operations;
- (b) burning said light gas waste in a burner adapted to ensure essentially complete combustion thereof at a temperature not exceeding about 2,000.degree. F. and sufficient to ensure that the silica particulates formed as a result of said combustion are of a size to facilitate subsequent filitration thereof from the resultant combustion product gases;
- (c) burning said heavy gas waste with a hydrogen-containing fuel at a temperature not exceeding about 2,000.degree. F. in a separate burner adapted to ensure essentially complete combustion of said waste to hydrogen chloride and silica of a particle size sufficient to facilitate subsequent filtration thereof from the combustion product gases;
- (d) burning said liquid waste at a temperature not exceeding about 2,000.degree. F. with a hydrogen-containing fuel in a separate burner adapted to ensure essentially complete combustion of such waste to hydrogen chloride and silica of a particle size sufficient to facilitate subsequent filtration thereof from the combustion product gases;
- (e) passing the combustion product gases from said separate burners to two bag filters units in series for separation of silica therefrom;
- (f) passing the combustion gases from said filter units to a liquid scrubbing zone for final cleanup ensuring that all particulate matter is removed therefrom, said zone having a stream of liquid withdrawn therefrom and recycled to said zone;
- (g) contacting said filtered silica with a hot gas stream to a temperature of at least about 700.degree. F. to ensure desorption of hydrogen chloride therefrom;
- (h) passing the filtered silica in said hot gas stream through a cyclone separation zone for recovery of by-product silica;
- (i) passing the combustion gases from said scrubbing zone to an absorption zone for contact with water therein thus producting dilute muriatic acid therein;
- (j) recovering by-product muriatic acid from said absorption zone;
- (k) withdrawing residual combustion product gas from said absorption zone, whereby all of the wastes produced are processed to form useful by-products and clean residual combustion product gas that can be vented to the atmosphere.
Dependencies are inferred from the claim text.