Methods of fabricating pellicles using supporting layer
AssigneesSamsung Electronics Co., Ltd., Research & Business Foundation Sungkyunkwan University
InventorsMunja Kim, Ji-Beom Yoo, Sooyoung Kim, Taesung Kim, Dong-Wook Shin, Hwanchul Jeon, Seul-Gi Kim
Life of this patent
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Abstract
The method includes forming a graphite layer on a substrate, forming a supporting layer on the graphite layer to form a stack of the graphite layer and the supporting layer, removing the substrate to separate the stack from the substrate, transferring the stack of the graphite layer and the supporting layer onto a frame, and removing the supporting layer from the frame.
Claims19
A method of fabricating a pellicle, the method comprising:
- forming a graphite layer on a substrate;
- forming a supporting layer on the graphite layer to form a stack of the graphite layer and the supporting layer;
- removing the substrate from the stack of the graphite layer and the supporting layer;
- transferring the stack of the graphite layer and the supporting layer onto a frame;
- and
- removing the supporting layer from the frame,
- wherein the transferring includes:
- suspending the stack on a solution containing water;
- and
- raising the frame from inside of the solution to a surface of the solution perpendicular to the stack.
A method of fabricating a pellicle, the method comprising:
- forming a first supporting layer on a first substrate;
- forming a graphite layer on a second substrate;
- removing the first substrate and the second substrate to separate the first supporting layer and the graphite layer from the first substrate and the second substrate, respectively;
- transferring the first supporting layer onto a frame;
- transferring the graphite layer onto the first supporting layer transferred onto the frame;
- and
- removing an exposed portion of the first supporting layer in an opening of the frame.
A method of fabricating a pellicle, the method comprising:
- forming a first supporting layer on a first substrate;
- forming a graphite layer on a second substrate;
- forming a second supporting layer on the graphite layer formed on the second substrate to form a stack of the graphite layer and the second supporting layer;
- separating the first supporting layer from the first substrate;
- separating the stack of the graphite layer and the second supporting layer from the second substrate;
- transferring the first supporting layer onto a frame;
- transferring the stack of the graphite layer and the second supporting layer onto the first supporting layer transferred on the frame;
- and
- removing a portion of the first supporting layer and the second supporting layer.
Dependencies are inferred from the claim text.