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US 8,569,893 B2Granted
Self-aligned, integrated circuit contact
AssigneeMicron Technology, Inc.
InventorPhilip J. Ireland
Life of this patent
Estimating the term…
Abstract
This document discusses, among other things, example systems including integrated circuit contacts configured to reduce the likelihood of shorting to unrelated portions of overlying conductive material due to contact misalignment.
Claims20
An electronic system comprising:
- a processor;
- and
- an integrated circuit die coupled to the processor, the integrated circuit die including an interconnect structure, the interconnect structure including:
- an insulation material;
- a conductive material overlaying the insulation material;
- a conductive interconnect disposed in an opening of the insulation material and underlying a portion of the conductive material, the conductive interconnect comprising:
- a horizontal top surface connected to the conductive material;
- a vertical side surface;
- and
- a notch defined by a non-horizontal and non-vertical surface extending between the top surface and the side surface;
- and
- a dielectric material connected to the non-horizontal and non-vertical surface defining the notch of the conductive interconnect.
9 more elements
An integrated electronic system comprising:
- a processor;
- and
- a memory circuit having a plurality of leads coupled to the processor, the memory circuit including a memory cell, the memory cell including:
- an insulating material forming a surface of the integrated memory cell;
- a contact within a contact opening in the insulating material, the contact including:
- a horizontal top surface;
- a vertical side surface;
- and
- a notch defined by a non-horizontal and non-vertical surface extending between the horizontal top surface and the vertical side surface;
- a conductive material overlaying the contact and contacting the horizontal top surface of the contact;
- and
- a dielectric material connected to the non-horizontal and non-vertical surface defining the notch of the contact.
9 more elements
Dependencies are inferred from the claim text.