Transistor, memory cell array and method of manufacturing a transistor
AssigneeInfineon Technologies AG
InventorJohannes von Kluge
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AssigneeInfineon Technologies AG
InventorJohannes von Kluge
Estimating the term…
A transistor includes a first and second source/drain regions, a channel connecting the first and second source/drain regions, and a gate electrode to control an electrical current flowing in the channel. The gate electrode is disposed in a gate groove, the gate groove being defined in a top surface of a semiconductor substrate. The first and second source/drain regions extend at least to a depth d1, the depth d1 being measured from the top surface of the substrate. A top surface of the gate electrode is disposed beneath the top surface of the semiconductor substrate. A top surface of the gate electrode is disposed at a depth d2 which is less than the depth d1, the depth d2 being measured from the substrate surface.
An integrated circuit including a transistor, the transistor comprising:
An integrated circuit including a memory cell array comprising:
Dependencies are inferred from the claim text.