Precision analog metal-metal capacitor
AssigneeInternational Business Machines Corporation
InventorsTerry J. Brabazon, Badih El-Kareh, Stuart R. Martin, Matthew J. Rutten, Carter W. Kaanta
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AssigneeInternational Business Machines Corporation
InventorsTerry J. Brabazon, Badih El-Kareh, Stuart R. Martin, Matthew J. Rutten, Carter W. Kaanta
Estimating the term…
A precision analog metal-metal capacitor is fabricated by forming a first capacitor plate in an insulation layer by forming a trench therein, depositing metal within the trench and planarizing the device. A thin dielectric layer is then deposited and patterned over the first capacitor plate. A second insulator is then deposited over the device and discrete openings etched therein to expose the insulation layer and first metal plate. Metal is deposited within the openings and planarized, thereby forming a contact to the first metal plate and the second metal plate of the capacitor.
A capacitor within a single insulation layer of a semiconductor device comprising:
A capacitor in a semiconductor device comprising:
A capacitor in a semiconductor device, comprising:
A capacitor in a semiconductor device comprising:
Dependencies are inferred from the claim text.