Non-Aminic photoresist adhesion promoters for microelectronic applications
AssigneeComplex Fluid Systems, Inc.
InventorsWilliam R. Peterson, Craig M. Stauffer
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Abstract
A method for providing an inorganic substrate having improved adherence for polymeric films is disclosed. The method entails reacting at least one organosilane compound having at least one alkylsilyl moiety therein and at least one hydrolyzable group capable of reacting with the substrate to silylate the substrate. Hydrolyzable by-products from the reaction, if any, have a pH less than or equal to about 7.
Claims20
A method for improving the adherence of a polymeric material to an inorganic, unprimed substrate comprising,
- priming said substrate with at least one organosilane compound having at least one alkylsilyl moiety and at least one hydrolyzable leaving group bound to silicon;
- reacting said at least one organosilane compound during priming with said substrate under conditions sufficient to silylate said substrate with a surface layer comprising the alkylsilyl moiety, wherein said hydrolyzable leaving group reacts with said substrate to form by-products having a pH less than or equal to about 7;
- and
- applying said polymeric material to said silylated substrate.
A method for improving the adherence of a polymeric material to an inorganic, unprimed substrate comprising,
- priming said substrate with at least one organosilane compound having at least one hydrolyzable leaving group bound to silicon and selected from the group consisting of O-trimethylsilylacetate, O-trimethylsilylproprionate, O-trimethylsilylbutyrate, trimethylsilyltrifluoroacetate, trimethylmethyoxysilane, N-methyltrimethylsilyltrifluoroacetamide, O-trimethylsilylacetylacetone, isopropenoxytrimethylsilane, bis(trimethylsilyl)trifluoroacetamide, methyltrimethylsilyldimethylketone acetate, and trimethylethoxysilane,
- reacting said at least one organosilane compound during priming with said substrate under conditions sufficient to silylate said substrate, wherein said hydrolyzable leaving group reacts with said substrate to form by-products having a pH less than or equal to about 7;
- and
- applying said polymeric material to said silylated substrate.
Dependencies are inferred from the claim text.