Microelectronic devices including pseudo gate-all-around memory cell structures, and related memory devices and electronic systems
AssigneeMicron Technology, Inc.
InventorYoshiaki Fukuzumi
Life of this patent
Estimating the term…
Loading patent…
AssigneeMicron Technology, Inc.
InventorYoshiaki Fukuzumi
Estimating the term…
A method of forming a microelectronic device includes forming a preliminary stack structure over a base structure, forming a first slot vertically extending through the preliminary stack structure, forming a dielectric mask material over exposed surfaces of sidewalls of the preliminary stack structure partially defining the first slot, forming gaps in the dielectric mask material, forming voids in sacrificial material and insulative material of the preliminary stack structure via the gaps in the dielectric mask material, forming memory cell material within the voids, and removing a portion of the memory cell material to form vertical memory string structures vertically extending through the preliminary stack structure. Related microelectronic devices, electronic devices, and related methods are also disclosed.
A method of forming a microelectronic device, comprising:
A microelectronic device, comprising:
A memory device, comprising:
Dependencies are inferred from the claim text.