Method for preparing a memory device
AssigneeNanya Technology Corporation
InventorsChin-Ling HUANG, Jhen-Yu TSAI, Cheng-Han YANG, Yi-Ju CHEN
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AssigneeNanya Technology Corporation
InventorsChin-Ling HUANG, Jhen-Yu TSAI, Cheng-Han YANG, Yi-Ju CHEN
Estimating the term…
The present application provides a method for preparing a memory device. The method includes: forming an active region in a substrate, wherein the active region has a linear top view shape; forming a gate structure on the substrate, wherein the gate structure has a linear portion intersected with a section of the active region away from end portions of the active region; forming a first insulating layer and a second insulating layer on the substrate, wherein the first insulating layer laterally surrounds the gate structure, and is covered by the second insulating layer; forming an opening penetrating through the first and second insulating layers and exposing a portion of the active region, wherein the opening is laterally spaced apart from the gate structure; and sequentially forming a dielectric layer and an electrode in the opening.
A method for preparing a memory device, comprising:
Dependencies are inferred from the claim text.