Semiconductor memory devices having vertical pillars that are electrically connected to lower contacts
AssigneeSamsung Electronics Co., Ltd.
InventorsTaeHee Lee, Kyoung-Hoon Kim, Hongsoo Kim
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AssigneeSamsung Electronics Co., Ltd.
InventorsTaeHee Lee, Kyoung-Hoon Kim, Hongsoo Kim
Estimating the term…
A semiconductor memory device may include an electrode structure including a selection line on a substrate and word lines between the substrate and the selection line, vertical pillars penetrating the electrode structure and being connected to the substrate, sub-interconnections and bit lines sequentially stacked on and electrically connected to the vertical pillars, and lower contacts connecting the vertical pillars to the sub-interconnections. The selection line may include a plurality of selection lines separated from each other in a first direction by an insulating separation layer, and central axes of the lower contacts connected in common to one of the sub-interconnections may be shifted, in a second direction across the first direction and parallel to a top surface of the substrate, from central axes of the vertical pillars thereunder.
A semiconductor memory device, comprising:
A semiconductor memory device, comprising:
Dependencies are inferred from the claim text.