Lithographic apparatus and device manufacturing method
AssigneeASML Netherlands B.V.
InventorsMartinus Hendrikus Antonius Leenders, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Michel Riepen, Sergei Shulepov
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Abstract
An immersion lithographic apparatus is disclosed in which a gas knife is shaped and a liquid removal device is positioned to improve removal of liquid from the surface of the substrate.
Claims26
-9. (canceled)
A lithographic apparatus, comprising:
- a projection system configured to transfer a pattern from a patterning device onto a substrate;
- a liquid supply system configured to provide liquid to a space between the projection system and a substrate;
- and
- a gas knife at least partly surrounding the space to contain liquid left on the substrate by the liquid supply system, wherein the gas knife comprises a plurality of curved elongate segments that do not all extend on a same circle, each segment having an inlet for gas.
-12. (canceled)
-16. (canceled)
-49. (canceled)
A device manufacturing method comprising projecting a patterned beam of radiation using a projection system through a liquid onto a substrate, wherein liquid is contained by a gas knife at least partly surrounding the space, and wherein the gas knife comprises a plurality of curved elongate segments that do not all extend on a same circle, each segment having an inlet for gas.
(canceled)
A device manufacturing method comprising:
- projecting a patterned beam of radiation using a projection system through a liquid onto a substrate;
- at least partly constraining the liquid in a space between the projection system and the substrate using a liquid containment device at least partly surrounding the space;
- providing a gas using a gas knife positioned spaced apart from the liquid containment device;
- and
- allowing liquid to escape from the liquid containment device such that it is on the substrate or a movable table with a free surface between the liquid containment device and the gas knife.
(canceled)
Dependencies are inferred from the claim text.