Inductor layout and manufacturing method thereof
AssigneesUnited Microelectronics Corp., National Taiwan University
InventorsTsun-Lai Hsu, Hsiao-Chin Chen, Shey-Shi Lu, Jen-Chung Chang, Chia-Jung Hsu
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Abstract
An inductor layout and manufacturing method thereof are provided. The inductor layout includes a substrate and a conductive path. The substrate includes at least an active region, wherein the active region includes at least a circuit. The conductive path is disposed over the substrate and arranged near the edge of the active region along the direction of the edge of the active region. Wherein, two ends of the conductive path are the two ends of the inductor.
Claims14
An inductor layout, comprising:
- a substrate, comprising at least an active region, wherein the active region comprises at least a circuit;
- and
- a conductive path, disposed near an edge of the active region over the substrate and arranged along a direction of the edge of the active region, wherein two ends of the conductive path are two ends of the inductor.
A fabricating method of an inductor, comprising:
- forming at least an active region on the substrate, wherein the active region comprises at least a circuit. forming a conductive path over the substrate, and the conductive path is disposed near the edge of the active region and is arranged along a direction of an edge of the active region, wherein two ends of the conductive path are two ends of the inductor.
Dependencies are inferred from the claim text.