Method and apparatus for feeding gas phase reactant into a reaction chamber
AssigneeASM Microchemistry Oy
InventorJanne Kesala
Life of this patent
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Abstract
The present invention concerns a method and an apparatus for feeding a gas phase reactant from a reactant source into a gas phase reaction chamber. In the method a reactant which is a liquid or solid at ambient temperature is vaporized from the reactant source at a vaporizing temperature; and the vaporized reactant is fed into the reaction chamber. According to the invention the reactant source and the reaction chamber are located in separate vessels which can be individually evacuated. By means of the invention it becomes possible to change and load new reactant chemical without breaking the vacuum of the reaction chamber.
Claims42
A method of feeding a gas phase reactant from a reactant source into a gas phase reaction chamber, wherein
- a reactant which is a liquid or solid at ambient temperature is vaporised from the reactant source at a vaporising temperature;
- the vaporised reactant is fed into the reaction chamber;
- and
- the reactant source and the reaction chamber are located in separate vessels which can be individually evacuated, characterized in that
- vaporising the reactant from liquid or solid reactant matter maintained in a reactant source comprising a first container having an opening, said first container being placed within a pressure shell and being heated to the vaporising temperature by using heating means fitted within the pressure shell;
- conducting the vaporised reactant from the container through a first purifier to remove impurities contained in the vaporised reactant;
- collecting the vaporised reactant in a gas space;
- and
- feeding gas phase reactant from the gas space into the gas phase reaction chamber via the first conduit.
Reactant source assembly for generating a gas phase reactant flow, comprising:
- a first container having an opening and containing liquid or solid reactant matter;
- a second container having a gas tight container wall enclosing the first container and defining a gas space around the first container;
- at least one first gas nozzle fitted in the container wall of the second container for feeding gas into the gas space;
- and
- at least one second gas nozzle fitted in the container wall of the second container for withdrawing reactant vaporized from first container and collected in the gas space.
Dependencies are inferred from the claim text.