Y10S 505/816
Sputtering, including coating, forming, or etching
Y10S505/816 (Sputtering, including coating, forming, or etching) appears on 76 US grants and 4 published applications in this corpus.
Search patents in Y10S- Granted patents
- 76
- Published applications
- 4
- Assignees
- 48
- Inventors
- 151
- Latest grant
- 3 Apr 2012
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 3 | 0 |
| 1978 | 0 | 0 |
| 1979 | 2 | 0 |
| 1980 | 0 | 0 |
| 1981 | 2 | 0 |
| 1982 | 3 | 0 |
| 1983 | 2 | 0 |
| 1984 | 2 | 0 |
| 1985 | 2 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 5 | 0 |
| 1990 | 7 | 0 |
| 1991 | 6 | 0 |
| 1992 | 6 | 0 |
| 1993 | 6 | 0 |
| 1994 | 8 | 0 |
| 1995 | 6 | 0 |
| 1996 | 3 | 0 |
| 1997 | 1 | 0 |
| 1998 | 2 | 0 |
| 1999 | 2 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 1 |
| 2005 | 0 | 0 |
| 2006 | 1 | 2 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 1 | 1 |
| 2011 | 1 | 0 |
| 2012 | 1 | 0 |
By publication year. Applications have been published since 2001.
Subgroups
Granted patents
Recent patents
- Superconducting film and method of manufacturing the same3 Apr 2012US 8,148,300 B2Central Research Institute of Electric Power Industry
- Superconducting integrated circuit technology using iron-arsenic compounds8 Nov 2011US 8,055,318 B1Hypres, Inc.
- Superconducting film and method of manufacturing the same10 Aug 2010US 7,772,157 B2Central Research Institute of Electric Power Industry
- Multilayer composites and manufacture of same7 Feb 2006US 6,994,775 B2The Regents of the University of California
- Process for the preparation of a high temperature superconductor17 Apr 2001US 6,218,341 B1Agency of Industrial Science and Technology
- Superconducting film and method of manufacturing the same21 Oct 2010US 2010/0267568 A1Central Research Institute of Electric Power Industry
- Superconducting film and method of manufacturing the same16 Nov 2006US 2006/0258539 A1Central Research Institute of Electric Power Industry
- Multilayer composites and manufacture of same15 Jun 2006US 2006/0124447 A1The Regents of the University of California
- Multilayer composites and manufacture of same10 Jun 2004US 2004/0110042 A1The Regents of the University of California
Most cited
By later US patents
- Selective silicon dioxide etchant for superconductor integrated circuits122US 4,904,341 AWestinghouse Electric Corp. · 1990
- Magnetron deposition of ceramic oxide-superconductor thin films82US 4,842,704 A1989
- Method of fabrication of Josephson tunnel junction68US 4,412,902 ANippon Telegraph & Telephone Public Corporation · 1983
- Oxide superconductor Josephson junction and fabrication method therefor67US 4,316,785 ANippon Telegraph & Telephone Public Corporation · 1982
- Low energy ion beam oxidation process52US 4,351,712 AInternational Business Machines Corporation · 1982