Multilayer composites and manufacture of same
AssigneeThe Regents of the University of California
InventorsTerry Holesinger, Quanxi Jia
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Abstract
The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam deposition process, where the disk-shaped targets include at least two segments with differing compositions, and a multilayer thin film structure having alternating layers of a first composition and a second composition, a pair of the alternating layers defining a bi-layer wherein the thin film structure includes at least 20 bi-layers per micron of thin film such that an individual bi-layer has a thickness of less than about 100 nanometers.
Claims3
1-33. (canceled)
A multilayer thin film structure having alternating layers of a first composition and a second composition, a pair of said alternating layers defining a bi-layer wherein said thin film structure includes at least 20 bi-layers per micron of thin film such that an individual bi-layer has a thickness of less than about 50 nanometers.
Dependencies are inferred from the claim text.