G05B 2219/49258
Two y axis to control also rotation
G05B2219/49258 (Two y axis to control also rotation) appears on 3 US grants and 0 published applications in this corpus.
Search patents in G05B- Granted patents
- 3
- Published applications
- 0
- Assignees
- 3
- Inventors
- 7
- Latest grant
- 24 Jun 2003
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Stage position control method and stage position control apparatus capable of improving positioning precision24 Jun 2003US 6,584,367 B1Sumitomo Heavy Industries, Ltd.
- Precision positioning apparatus30 Apr 1996US 5,511,930 ACanon Kabushiki Kaisha
- Multi-axis gas bearing stage assembly30 Jun 1987US 4,676,649 ACompact Spindle Bearing Corporation
No published applications in this class yet.
Most cited
By later US patents
- Multi-axis gas bearing stage assembly65US 4,676,649 ACompact Spindle Bearing Corporation · 1987
- Precision positioning apparatus33US 5,511,930 ACanon Kabushiki Kaisha · 1996
- Stage position control method and stage position control apparatus capable of improving positioning precision15US 6,584,367 B1Sumitomo Heavy Industries, Ltd. · 2003