G02B 27/4222
In projection exposure systems
Official title: {in projection exposure systems, e.g. photolithographic systems}
G02B27/4222 (In projection exposure systems) appears on 76 US grants and 63 published applications in this corpus.
Search patents in G02B- Granted patents
- 76
- Published applications
- 63
- Assignees
- 42
- Inventors
- 183
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 2 | 0 |
| 1991 | 0 | 0 |
| 1992 | 3 | 0 |
| 1993 | 2 | 0 |
| 1994 | 2 | 0 |
| 1995 | 2 | 0 |
| 1996 | 0 | 0 |
| 1997 | 3 | 0 |
| 1998 | 1 | 0 |
| 1999 | 2 | 0 |
| 2000 | 0 | 0 |
| 2001 | 3 | 1 |
| 2002 | 3 | 7 |
| 2003 | 3 | 4 |
| 2004 | 2 | 2 |
| 2005 | 5 | 3 |
| 2006 | 0 | 1 |
| 2007 | 2 | 0 |
| 2008 | 0 | 2 |
| 2009 | 0 | 3 |
| 2010 | 0 | 0 |
| 2011 | 0 | 1 |
| 2012 | 1 | 0 |
| 2013 | 0 | 0 |
| 2014 | 1 | 2 |
| 2015 | 1 | 1 |
| 2016 | 1 | 1 |
| 2017 | 3 | 2 |
| 2018 | 2 | 3 |
| 2019 | 0 | 6 |
| 2020 | 8 | 3 |
| 2021 | 4 | 3 |
| 2022 | 6 | 4 |
| 2023 | 2 | 5 |
| 2024 | 3 | 5 |
| 2025 | 7 | 4 |
| 2026 | 2 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Imaging optical unit30 Jun 2026US 12,669,755 B2Carl Zeiss SMT GmbH
- Configurable light emission by selective beam-sweeping16 Jun 2026US 12,656,599 B2Cognex Corporation
- Display apparatus for providing an enlarged display area22 Jul 2025US 12,366,761 B2Shenzhen Qize Technology Partnership (Limited Partnership)
- Device and method for compensating effects of pantoscopic tilt or wrap/sweep tilt on an image presented on an augmented reality or virtual reality display1 Jul 2025US 12,345,891 B2Snap Inc.
- Device and method for compensating effects of pantoscopic tilt or wrap/sweep tilt on an image presented on an augmented reality or virtual reality display3 Jun 2025US 12,320,979 B2Snap Inc.
- Intraoral 3d scanning system using mirror and structured light projection with multiple pattern feature types2 Oct 2025US 2025/0302596 A1Align Technology, Inc.
- Laser processing system, laser processing method, and method for manufacturing electronic device14 Aug 2025US 2025/0258438 A1Gigaphoton Inc.
- Intraoral 3d scanning system using mirror and structured light projection19 Jun 2025US 2025/0195183 A1Align Technology, Inc.
- Intraoral 3d scanning system using uniform structured light projection30 Jan 2025US 2025/0032227 A1Align Technology, Inc.
- Display for augmented reality12 Dec 2024US 2024/0411140 A1Snap Inc.
Most cited
By later US patents
- High-efficiency, multilevel, diffractive optical elements373US 4,895,790 AMassachusetts Institute of Technology · 1990
- High resolution imagery systems and methods146US 4,936,665 A1990
- High-efficiency, multilevel, diffractive optical elements99US 5,218,471 AMassachusetts Institute of Technology · 1993
- High resolution imagery systems and methods76US 5,156,943 A1992
- High-efficiency, multilevel, diffractive optical elements75US 5,161,059 AMassachusetts Institute of Technology · 1992