Three-dimensional memory device having ring-shaped etch-stop patterns interposed between lower and upper layer stacks
AssigneeSK hynix Inc.
InventorHyun Ho Lee
Life of this patent
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Abstract
A semiconductor device includes a first stack including a plurality of alternating layers of first interlayer insulating layers and first conductive patterns; a second stack including a plurality of alternating layers of second conductive patterns and second interlayer insulating layers, the second stack being positioned above the first stack; a plurality of pillar-structures each pillar structure passing through the first and second stacks; and a ring pattern layer disposed between the first and second stacks, the ring pattern layer comprising a plurality of ring patterns, each ring pattern surrounding each pillar-structure.
Claims13
A semiconductor device comprising:
- a first stack including a plurality of alternating layers of first interlayer insulating layers and first conductive patterns;
- a second stack including a plurality of alternating layers of second conductive patterns and second interlayer insulating layers, the second stack being positioned above the first stack;
- a plurality of pillar-structures each pillar structure passing through the first and second stacks;
- and
- a ring pattern layer disposed between the first and second stacks, the ring pattern layer comprising a plurality of ring patterns, each ring pattern surrounding each pillar-structure, wherein the ring patterns directly contact a lowermost second conductive pattern among the second conductive patterns and directly contact an uppermost first interlayer insulating layer among the first interlayer insulating layers.
Dependencies are inferred from the claim text.