Semiconductor device, display driver integrated circuit including the device, and display device including the device

A display driver integrated circuit (IC) comprising:

• a gamma circuit configured to generate a plurality of gamma voltages;
• and
• a source driver including a plurality of decoders configured to select and output any one of the plurality of gamma voltages generated by the gamma circuit through a plurality of third interconnections and a plurality of fourth interconnections,
• wherein the plurality of third interconnections extend over a substrate at a first level and are respectively connected at bottom surfaces thereof to a plurality of first interconnections, disposed at a lower level than the first level, by a plurality of first contact plugs,
• the plurality of fourth interconnections extend over the substrate at a second level that is higher than the first level and are respectively connected to a plurality of second interconnections disposed at a lower level than the first level by stacked contact plugs including a plurality of second contact plugs and a plurality of third contact plugs,
• each of the second contact plugs extends vertically upwardly from a respective one of the second interconnections so as to be connected to said respective one of the second interconnections, and each of the third contact plugs extends vertically downwardly from a respective one of the third interconnections so as to be connected to said respective one of the third interconnections,
• each of the second contact plugs has a top surface, each of the third contact plugs has a bottom surface, the top and the bottom surfaces of respective ones of the second and third contact plugs meet to form an interface at which the respective third contact plug is stacked directly on the respective second contact plug such that the respective third contact plug extends vertically between and connects a respective one of the second contact plugs and a respective one of the fourth interconnections to each other, the interface being coplanar with the bottom surfaces of the third interconnections,
• the area of the top surface of each of the second contact plugs is at least equal to the area of the bottom surface of the third contact plug stacked directly thereon, and
• the third interconnections and the fourth interconnections extend longitudinally parallel to each other and are alternately disposed with respect to each other as viewed in a direction perpendicular to a main surface of the substrate, and
• a width of each of the fourth interconnections is the same as or greater than a distance between adjacent ones of the third interconnections.

A semiconductor device comprising:

• a plurality of first and second interconnections disposed over a substrate;
• a plurality of third interconnections disposed at a first level above the plurality of first interconnections;
• and
• a plurality of fourth interconnections disposed at a second level above the first level,
• wherein the first interconnections and the third interconnections are connected to each other by first contact plugs, and the second interconnections and the fourth interconnections are connected to each other by stacked contact plugs,
• each of the interconnections comprises a strip of conductive material such that each of the interconnections has a respective length and a width less than its length,
• the third and fourth interconnections extend parallel to each other in directions of their lengths, and are disposed alternately with respect to each other in directions of their widths as viewed in a direction perpendicular to a main surface of the substrate,
• the widths of the third and fourth interconnections are each greater than any of the widths of the first and second interconnections,
• each of the stacked contact plugs comprises a second contact plug connected to a respective second interconnection from among the plurality of second interconnections, and a third contact plug connected to the second contact plug and a respective fourth interconnection from among the plurality of fourth interconnections,
• each of the second contact plugs has a top surface, each of the third contact plugs has a bottom surface, the top and the bottom surfaces of respective ones of the second and third contact plugs meet to form an interface at which the respective third contact plug is stacked directly on the respective second contact plug such that the respective third contact plug extends vertically between and connects the respective second contact plugs and the respective fourth interconnections to each other, the interface being coplanar with bottom surfaces of the third interconnections,
• the area of the top surface of each of the second contact plugs is at least equal to the area of the bottom surface of the third contact plug stacked directly thereon, and
• a width of each of the fourth interconnections is the same as or greater than a distance between adjacent ones of the third interconnections.