Wafer container with door interface seal
AssigneeEntegris, Inc.
InventorsBarry Gregerson, Matthew A. Fuller
Life of this patent
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AssigneeEntegris, Inc.
InventorsBarry Gregerson, Matthew A. Fuller
Estimating the term…
A wafer container may be a front opening wafer container comprising a container portion and a door, one of the container portion and the door having a radially installed seal with a plurality of opposing lateral projections that deflect from a normal position in a direction away from an install direction when the seal is installed in a groove, the lateral projections resisting removal of the seal after the seal is seated in the groove. A core portion and a cantilevered finger member engages the other of the door and container portion when the door is seated in the container portion. Other lateral projections on the seal effectively seal the path between the seal and groove surfaces.
A substrate container having a container portion with a door frame defining an open side and a door to latch to the door frame and close the open side, the door having a groove with a pair of sidewalls extending around a periphery of the door with a seal installed in said groove, the seal engageable with the door frame for sealing the door to the container portion, the seal having a pedestal portion seated in a bottom of the groove, the pedestal portion engaging each of the sidewalls, a core portion extending from the pedestal to a top of the seal, a plurality of opposing pairs of projections for engaging opposing sidewalls of the groove extending from the core portion, at least one pair sized to be larger than the groove at a position corresponding to the at least one pair of projections whereby the projections are angled upwardly and inhibit removal of the seal from the groove, another pair of projections extend directly laterally outwardly engaging the sidewalls, and positioned above the pair of projections that are angled upwardly, wherein the groove is defined by an inward wall and an outward wall, and wherein the outward wall has a shoulder portion below the top of the seal and wherein the seal has a lateral projection that engages the surface of the shoulder portion and an obliquely extending projection positioned above the lateral projection, said lateral projection and said obliquely extending projection being part of a C-Shaped portion, wherein the obliquely extending projection is deflected toward the lateral projection when the door is placed in the doorframe.
A front opening wafer container for holding large diameter wafers of at least 300 mm, the wafer container comprising a container portion with an open front defined by a door frame, a door for sealing latching to the container portion in the door frame, the door having a groove for receiving a seal extending around a periphery of the door with a seal therein, the seal having at least three pairs of opposing lateral projections and at least five distinct and separate regions of contact with the door, wherein the groove is defined by an inward wall and an outward wall, and wherein the outward wall has a shoulder portion below the top of the seal and wherein the at least three pairs of opposing lateral projections includes a lateral projection that engages the surface of the shoulder portion, and the seal further comprises an obliquely extending projection positioned above the lateral projection that engages the surface of the shoulder portion, said lateral projection and said obliquely extending projection being part of a C-Shaped portion, wherein the obliquely extending projection is deflected toward the lateral projection when the door is placed in the doorframe.
A sealable container for holding a plurality of wafers, the container comprising:
Dependencies are inferred from the claim text.