Apparatus and methods for inhibiting immersion liquid from flowing below a sustrate

A method of forming an image of a pattern onto a substrate, the method comprising:

• holding the substrate on a substrate stage of a lithographic exposure apparatus with a substrate holding member of the substrate stage;
• projecting the image through a projection optical system of the lithographic exposure apparatus and onto a surface of the substrate held by the substrate holding member while an immersion liquid is disposed in at least a part of a gap between a last optical element of the projection optical system and the surface of the substrate, the image being projected onto the surface of the substrate after passing through the immersion liquid;
• and
• collecting immersion liquid that overflows the outer periphery of the substrate with an immersion liquid collection member disposed so as to be located at least partly below the outer periphery of the substrate held by the substrate holding member, the collection member having an uppermost liquid-receiving surface that is spaced below a lowermost surface of the substrate held by the substrate holding member,
• wherein the collection member includes a first portion and a second portion, the first portion is located radially inward of the second portion so that the first portion is disposed closer to a center of the substrate holding member than is the second portion, a surface of the first portion is hydrophobic so as to repel the immersion liquid to assist in causing the immersion liquid to move from the first portion toward the second portion, at least a part of the hydrophobic surface of the first portion is disposed directly under the outer periphery of the substrate held by the substrate holding member, the second portion includes a hydrophilic surface, the hydrophobic surface and the hydrophilic surface are disposed so that the hydrophobic surface and at least a part of the hydrophilic surface of the second portion are parallel to the substrate held by the substrate holding member.