Methods, equipment and systems for measuring radio frequency crosstalk

An equipment for determining radio frequency crosstalk, comprising:

• an adjusting module, configured for adjusting an impedance value of a matching network associated with a radio frequency electrode in a plasma enhanced chemical vapor deposition (PECVD) system or adjusting an impedance value of a radio frequency energy generating equipment associated with the radio frequency electrode, so that a sum of the impedance value of the matching network and a impedance value of the radio frequency electrode is substantially the same as the impedance value of the radio frequency energy generating equipment;
• a measurement module, configured for instructing the radio frequency energy generating equipment to suspend transmission of radio frequency energy to the radio frequency electrode and detecting the electrical signal received by the radio frequency electrode;
• and measuring an electrical signal received by the radio frequency electrode during radio frequency energy generating equipment suspending transmission of radio frequency energy to the radio frequency electrode;
• and
• a calculation module, configured for determining an energy of a radio frequency crosstalk based at least on the electrical signal received.

A method for determining interference in a PECVD system, the method comprising:

• measuring a first impedance value of an RF source and an second impedance value of an electrode;
• providing a matching module, the matching module being electrically coupled to the RF source and electrode, the matching module being characterized by a third impedance value, the third impedance value being adjustable;
• adjusting the third impedance value at least based on the first impedance value and the second impedance value;
• suspending transmission of radio frequency energy from the RF source to the electrode, and measuring an electrical signal received by the electrode during suspending transmission of radio frequency energy from the RF source to the electrode;
• and
• determining a crosstalk energy based on the electrical signal received.