Method and system for cleaning photomasks

A photomask cleaning method for cleaning a photomask including a target surface, comprising steps of:

• providing a cleansing device including a scrubbing unit;
• positioning a retained photomask for arranging a target surface thereof towards the scrubbing unit;
• forming a pre-pressed state between the scrubbing unit and the photomask with a predetermined pressure;
• cleaning the target surface of the photomask with a moist and partially exposed scrubbing surface of the scrubbing unit;
• dispensing fluids obliquely towards the target surface to remove loosen contaminants via the cleansing device so as to establish a non-orthogonal angle between the target surface and the fluid dispensing towards the photomask, the dispensing fluids dispensed from two oblique dispensers arranged on two sides of the scrubbing unit;
• forming at least one oblique surface under the obliquely dispensed fluids and facing the target surface, the at least one oblique surface arranged between the scrubbing unit and the two dispensers and surrounding the scrubbing unit and proximate the scrubbing surface, the at least one oblique surface having an inner portion adjacent to the scrubbing unit and an outer portion away from the scrubbing unit, the inner portion approximating the target surface and the outer portion being away from the target surface, such that the at least one oblique surface arranged inclined to the target surface and towards the obliquely dispensed fluids forms a channeling region for channeling away fluids after cleaning from the photomask;
• draining the collected fluids after cleaning;
• and
• positioning the photomask to a drying area for blow drying.