Substrate handler

A modular loadport for supplying film frames to a wafer handling system comprising:

• a frame that may be secured to the wafer handling system at a port formed through a wall of the wafer handling system;
• an elevator coupled to the frame for vertical movement;
• a cassette support mounted on the elevator, the cassette support having at least one mounting device for securing a cassette thereto;
• a slide secured to the frame so as to pass at least partially through the port of the wafer handling system, the slide having an upper planar surface that is substantially planar parallel with at least one surface defined by a cassette mounted on the cassette support;
• and
• a gripper positioned in a channel formed in the slide, the gripper movable to a first position in which the gripper is addressed to an edge of a film frame in a cassette secured to the cassette support.

A loadport, comprising:

• a retractable gripper moveable between first and second positions, wherein the gripper in the first position is addressed to an edge of a film frame in a cassette;
• a frame support extending from the load port, the frame support having a length such that the frame support extends at least partially into a handler when the loadport is coupled to the handler;
• and
• a shuttle for moving the gripper between its first and second positions, the shuttle having a dimension that extends no farther than a distal end of the frame support.

A semiconductor substrate handling mechanism comprising:

• an alignment plate having a first end and a second end;
• a control mechanism moveable between the first end of the alignment plate and the second end of the alignment plate, the control mechanism being addressed to a semiconductor substrate when positioned at the first end of the alignment plate;
• and
• an alignment mechanism extendable through the upper surface of the alignment plate between a first, extended position in which a semiconductor substrate resting on the alignment plate may be biased into contact with the alignment mechanism and a second, retracted position, wherein the alignment mechanism comprises a plurality of sets of pins, each set of pins selectively positioned in the alignment plate to define an aligned position for a semiconductor substrate of a size that corresponds to a selected one set of pins of the alignment mechanism.

A semiconductor substrate handling mechanism comprising:

• an alignment plate having a first end and a second end;
• a control mechanism moveable between the first end of the alignment plate and the second end of the alignment plate, the control mechanism being addressed to a semiconductor substrate when positioned at the first end of the alignment plate;
• an alignment mechanism extendable through the upper surface of the alignment plate between a first, extended position in which a semiconductor substrate resting on the alignment plate may be biased into contact with the alignment mechanism and a second, retracted position;
• a bias mechanism extendable through the upper surface of the alignment plate between a first, extended position and a second, retracted position, the bias mechanism moveable toward and away from the alignment mechanism when in its first position;
• and
• a controller for coordinating the operation of the control mechanism, the alignment mechanism and the bias mechanism, the controller being communicatively connected to each of the control mechanism, the alignment mechanism, and the bias mechanism.