US 9,040,399 B2Granted

Threshold voltage adjustment for thin body MOSFETs

AssigneeInternational Business Machines Corporation

InventorsMaryJane Brodsky, Ming Cai, Dechao Guo, William K. Henson, Shreesh Narasimha, Yue Liang, Liyang Song, Yanfeng Wang, Chun-Chen Yeh

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Abstract

A structure includes a substrate; a transistor disposed over the substrate, the transistor comprising a fin comprised of Silicon that is implanted with Carbon; and a gate dielectric layer and gate metal layer overlying a portion of the fin that defines a channel of the transistor. In the structure a concentration of Carbon within the fin is selected to establish a desired voltage threshold of the transistor. Methods to fabricate a FinFET transistor are also disclosed. Also disclosed is a planar transistor having a Carbon-implanted well where the concentration of the Carbon within the well is selected to establish a desired voltage threshold of the transistor.

A method to fabricate transistor devices, comprising:

providing a Silicon layer having a layer of screen oxide formed on a top surface;
applying a first masking layer so as to leave uncovered a first portion of the screen oxide layer;
implanting Carbon into the Silicon layer through the uncovered first portion of the screen oxide layer to form a first Carbon-implanted volume of the Silicon layer that has a first Carbon concentration;
removing the first masking layer;
applying a second masking layer so as to leave uncovered a second portion of the screen oxide layer;
implanting Carbon into the Silicon layer through the uncovered second portion of the screen oxide layer to form a second Carbon-implanted volume of the Silicon layer that has a second Carbon concentration that differs from the first Carbon concentration;
removing the second masking layer;
and
processing the Silicon layer so as to form a first FinFET device having a channel that contains the first volume of the Silicon layer and a second FinFET device having a channel that contains the second volume of the Silicon layer, where the first FinFET device has a first voltage threshold and the second FinFET device has a second voltage threshold that differs from the first voltage threshold by an amount related to a difference between the first Carbon concentration and the second Carbon concentration,
where each step of implanting comprises use of at least two Carbon implant operations each carried out using a different implant energy such that the concentration of Carbon is made substantially uniform throughout the thickness of the layer of Silicon within the implanted volume;
and where
each of the first and the second Carbon concentrations is in a range of about 2×1014 to about 5×1015 atoms/cm3 to selectively establish the value of the voltage threshold in each of the first FinFET device and the second FinFET device as a function of the first Carbon concentration and the second Carbon concentration.

9 more elements

Abstract

Claims5