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US 8,952,464 B2Granted
MEMS apparatus
AssigneeSensor Tek, LLC
InventorsMao-Chen Liu, Po-Wei Lu, Wen-Chieh Chou, Shu-Yi Weng, Chun-Chieh Wang
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AssigneeSensor Tek, LLC
InventorsMao-Chen Liu, Po-Wei Lu, Wen-Chieh Chou, Shu-Yi Weng, Chun-Chieh Wang
Estimating the term…
A MEMS apparatus includes a pillar, a supporter, and a solder. The pillar has a first side and a second side opposite to the first side. The supporter supports the pillar. The supporter is adjacent to the pillar, but the supporter is not connected to the pillar. The supporter has a third side and a fourth side opposite to the third side. The supporter includes a plurality of first confined layers and a plurality of second confined layers. These first confined layers and these second confined layers are overlapped with each other. The second side and the third side are adjacent to each other. The solder is located between the second side and the third side. The solder is also located at the first side and the fourth side. The solder is utilized to combine the pillar and the supporter. The solder also isolates the pillar and the supporter.
A micro-electromechanical system (MEMS) apparatus, comprising:
Dependencies are inferred from the claim text.