Aperture control of thermal processing radiation
AssigneeApplied Materials, Inc.
InventorsAmikam Sade, Stephen Moffatt, Bruce E. Adams
Life of this patent
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Abstract
Device for processing a substrate are described herein. Devices can include a radiation source and an aperture positioned to receive radiant energy from the radiation source. The aperture can include one or more members, and one or more interfering areas, wherein the interfering areas surround a transmissive area. The one or more structures can affect transmission of radiant energy through a portion of the transmissive area of the aperture. Structures disposed on the aperture can reduce or redirect transmission to provide for more uniform overall transmission of radiant energy through the aperture.
Claims18
A device for processing a substrate comprising:
- a thermal annealing radiation source;
- an aperture positioned to receive radiant energy from the thermal annealing radiation source, the aperture comprising:
- one or more transmissive members;
- and
- an energy blocking member, wherein the energy blocking member creates an interfering area, and wherein the interfering area defines a transmissive area through the one or more transmissive members;
- and
- a structure affecting transmission of radiant energy through a portion of the transmissive area of the transmissive member, wherein the structure affecting transmission of radiant energy is not uniform across the transmissive member.
A device for processing a substrate comprising:
- a thermal annealing radiation source which provides radiant energy;
- an aperture positioned to receive radiant energy from the thermal annealing radiation source, the aperture comprising:
- one or more transmissive members;
- one or more first structures comprising an interfering area formed on or in at least one of the one or more transmissive members;
- and
- a transmissive area, wherein the transmissive area is defined by the first structures and comprises at least a first area and a second area;
- and
- one or more second structures disposed on or in at least a portion of the transmissive area of the transmissive member, wherein the one or more second structures alter transmission of radiant energy in the first area to a greater extent than the second area.
A device for processing a substrate comprising:
- a thermal annealing radiation source which provides radiant energy;
- an aperture positioned to receive radiant energy from the thermal annealing radiation source, the aperture comprising:
- at least one transmissive member;
- one or more first structures comprising an interfering area formed on or in each transmissive member;
- and
- a transmissive area, wherein the transmissive area is defined by the first structures;
- and
- one or more second structures disposed in at least a portion of the transmissive area of the aperture, wherein the second structures have a dimension which is less than the wavelength of the radiant energy or wherein the second structures comprise an intensity correcting structure.
A device for processing a substrate comprising:
- a thermal annealing radiation source which provides radiant energy;
- an aperture positioned to receive radiant energy from the thermal annealing radiation source, the aperture comprising:
- one or more transmissive members;
- one or more first structures comprising an interfering area formed on or in at least one of the one or more transmissive members;
- and
- a transmissive area, wherein the transmissive area is defined by the first structures and comprises at least a first area and a second area;
- and
- one or more second structures disposed on or in at least a portion of the transmissive area of the transmissive member, wherein the second structures comprise an extremity shaping structure or an intensity correcting structure, and wherein the extremity shaping structure or the intensity correcting structure comprises convexities, concavities or a combination thereof formed on or in the one or more transmissive members.
A device for processing a substrate comprising:
- a thermal annealing radiation source;
- an aperture positioned to receive radiant energy from the thermal annealing radiation source, the aperture comprising:
- at least one transmissive member;
- and
- an energy blocking member, wherein the energy blocking member comprises an interfering area, and wherein the interfering area defines a transmissive area through each transmissive member;
- and
- at least one structure affecting transmission of radiant energy through a portion of the transmissive area of the aperture, wherein 1) the energy blocking member is tapered or 2) wherein the structure is an intensity correcting structure that comprises convexities, concavities, or a combination thereof formed on or in each transmissive member.
Dependencies are inferred from the claim text.