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US 8,783,273 B2Granted
No-contact wet processing tool with site isolation
AssigneeIntermolecular, Inc.
InventorRajesh Kelekar
Life of this patent
Estimating the term…
Abstract
Embodiments of the current invention describe a substrate processing tool. The substrate processing tool includes a housing defining a chamber, a substrate support, a container, and an impelling mechanism. The substrate support is coupled to the housing and configured to support a substrate within the chamber. The container is coupled to the housing within the chamber and configured to hold a liquid. The container is below and spaced apart from the substrate. The impelling mechanism is coupled to the housing and configured to apply a force to the liquid within the container such that an impelled portion of the liquid contacts a lower surface of the substrate.
Claims12
A substrate processing tool comprising:
- a housing defining a chamber;
- a substrate support coupled to the housing and configured to support a substrate within the chamber;
- a first container coupled to the housing within the chamber and configured to hold a first liquid, the first container being below and spaced apart from a lower surface of the substrate;
- a first impelling mechanism coupled to the housing and configured to apply a force to the first liquid within the first container such that an impelled portion of the first liquid contacts a first portion of the lower surface of the substrate;
- a second container coupled to the housing within the chamber and configured to hold a second liquid, the second container being below and spaced apart from the lower surface of the substrate;
- a second impelling mechanism coupled to the housing and configured to apply a second force to the second liquid within the second container such that an impelled portion of the second liquid contacts a second portion of the lower surface of the substrate, wherein the first liquid is isolated from the second liquid and a width of the first portion of the lower surface of the substrate and a width of the second portion of the lower surface of the substrate are less than a width of the lower surface of the substrate;
- and
- a third container coupled to the housing within the chamber, spaced apart from the substrate, and positioned substantially below the lower surface of the substrate, wherein the first container and the second container are positioned within the third container such that liquid held by the third container contacts an interstitial portion of the lower surface of the substrate between the first and second portions of the lower surface of the substrate.
5 more elements
A substrate processing tool comprising:
- a housing defining a chamber;
- a substrate support coupled to the housing and configured to support a substrate within the chamber;
- a first isolation container coupled to the housing within the chamber and configured to hold a first liquid, the first isolation container being below and spaced apart from the substrate and having a width that is less than a width of the substrate;
- a first impeller rotatably coupled to the housing and positioned within the first isolation container, wherein rotation of the first impeller causes a force to be applied to the first liquid in the first isolation container such that an impelled portion of the first liquid contacts a first portion of the lower surface of the substrate;
- a second isolation container coupled to the housing within the chamber and configured to hold a second liquid, the second isolation container being below and spaced apart from the substrate and having a width that is less than the width of the substrate;
- a second impeller rotatably coupled to the housing and positioned within the second isolation container, wherein rotation of the second impeller causes a force to be applied to the second liquid in the second isolation container such that an impelled portion of the second liquid contacts a second portion of the lower surface of the substrate, wherein the liquid in the first isolation container is isolated from the second liquid in the second isolation container;
- and
- an interstitial container coupled to the housing within the chamber, spaced apart from the substrate, and positioned substantially below the substrate, wherein the first container and the second container are positioned within the interstitial container such that liquid held by the interstitial container contacts an interstitial portion of the lower surface of the substrate between the first and second portions of the lower surface of the substrate.
5 more elements
Dependencies are inferred from the claim text.