Substrate support apparatus and substrate transport apparatus having shock absorption

A substrate support apparatus having a substrate holding portion to be inserted into a center hole formed in a substrate to support the substrate in a vertical orientation, the apparatus comprising:

• a first connecting plate connected to the substrate holding portion;
• a second connecting plate which faces the first connecting plate and is connectable to a transport robot that transports the substrate to a substrate holder;
• a shock absorbing member arranged between the first connecting plate and the second connecting plate so as to allow a movement of the first connecting plate relative to the second connecting plate in horizontal and vertical directions;
• and
• support members configured to connect the first connecting plate to the second connecting plate while allowing the movement of the first connecting plate relative to the second connecting plate, wherein the support members (i) are cord-like and (ii) have one of low elasticity and inelasticity.