Substrate storage container
AssigneeShin-Etsu Polymer Co., Ltd.
InventorOsamu Ogawa
Life of this patent
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Abstract
A substrate storage container includes an attachment structure in a container body for storing substrates so that a transport component is removably attached to the attachment structure. The attachment structure includes a supporting rail portion provided on an outer wall of the container body, a guide piece provided on the outer wall of the container body, and an engagement part formed with the guide piece. A forked portion formed of a combination of the guide piece and the engagement part. The transport component includes a hollowed frame-shape main part member supported by the supporting rail portion of the attachment structure.
Claims6
A substrate storage container comprising:
- an attachment structure in a container body for storing substrates so that a transport component is removably attached to the attachment structure,
- wherein the attachment structure-comprises:
- a supporting rail portion provided on an outer wall of the container body;
- a guide piece provided on the outer wall of the container body;
- and
- an engagement part formed with the guide piece, forming a forked portion of a combination of the guide piece and the engagement part, and
- wherein the transport component comprises:
- a hollowed frame-shape main part member supported by the supporting rail portion of the attachment structure,
- wherein the hollowed frame-shape main part member is formed with circulation openings in a peripheral wall for fluids and an elastic engagement piece to be guided by the guide piece of the attachment structure,
- wherein the elastic engagement piece being made to interfere with the forked portion of the guide piece and the engagement part of the attachment structure.
Dependencies are inferred from the claim text.