Cleaning device
AssigneeSTS Corporation
InventorDong Young Ryou
Life of this patent
Estimating the term…
Abstract
A cleaning device for cleaning a mixing vaporizer is provided. The mixing vaporizer includes a first hole that a raw material flows in therethrough, a second hole that carrier gas flows in therethrough, a mixing space that generates mixed gas by mixing the raw material and the carrier gas, a carrier gas nozzle that is connected to the second hole for supplying the carrier gas to the mixing space, and a third hole that discharges the mixed gas. The cleaning device cleans the mixing vaporizer by circulating a cleaning solution through at least one the first hole, the second hole, and the third hole.
Claims9
A cleaning device for cleaning a mixing vaporizer, wherein the mixing vaporizer comprises a first hole that a raw material flows in therethrough, a second hole that carrier gas flows in therethrough, a mixing space that generates mixed gas by mixing the raw material and the carrier gas, a carrier gas nozzle that is connected to the second hole for supplying the carrier gas to the mixing space, and a third hole that discharges the mixed gas,
- wherein the cleaning device cleans the mixing vaporizer by circulating a cleaning solution through at least one the first hole, the second hole, and the third hole,
- wherein the cleaning device comprises:
- a cleaning solution tank for storing the cleaning solution;
- a circulation pump for circulating the cleaning solution in the mixing vaporizer;
- and
- a direction-changing member, wherein the direction-changing member connecting the first hole and the second hole to the circulation pump and connecting the third hole to the cleaning solution tank during a circulation in a normal direction, and the direction-changing member connecting the third hole to the circulation pump and connecting the first hole and the second hole to the cleaning solution tank during a circulation in a reverse direction,
- wherein the mixing vaporizer is cleaned along the normal direction and the reverse direction by the direction-changing member.
A cleaning device, comprising:
- a cleaning solution tank storing a cleaning solution for cleaning a mixing vaporizer, wherein the mixing vaporizer comprising a first hole that a raw material flows in therethrough, a second hole that carrier gas flows in therethrough, a mixing space that generates mixed gas by mixing the raw material and the carrier gas, a carrier gas nozzle that is connected to the second hole for supplying the carrier gas to the mixing space, and a third hole that discharges the mixed gas,
- a deionized-water tank storing deionized water for cleaning the mixing vaporizer;
- a circulation pump circulating the cleaning solution or the deionized water in the mixing vaporizer;
- and
- a selection member, the selection member connecting the circulation pump to the cleaning solution tank for returning the cleaning solution, which is discharged from the mixing vaporizer, into the cleaning solution tank when the cleaning solution is circulated, and the selection member connecting the circulation pump to the deionized-water tank for returning the deionized water, which is discharge from the mixing vaporizer, into the deionized-water tank when the deionized water is circulated.
Dependencies are inferred from the claim text.