Plasma treatment container internal member, and plasma treatment apparatus having the plasma treatment container internal member

A plasma treatment container internal member disposed in a plasma treatment container for performing process on an object to be treated by plasma, comprising:

• a thermally sprayed film provided on a surface of a base material of the plasma treatment container internal member,
• an anodic oxide coating including a barrier layer and a ceramic layer,
• wherein the barrier layer and the ceramic layer are consecutively laminated in that order between the base material and the thermally sprayed film,
• the ceramic layer includes a first and a second layer, the first layer formed on the barrier layer and the second layer formed on the first layer, and a porosity of the first layer is lower than that of the second layer,
• the thermally sprayed film adheres to the anodic oxide coating with an adhesion greater than 40 MPa.

A plasma treatment container internal member comprising:

• an anodic oxide coating formed on a surface of a base material of the plasma treatment container internal member;
• and
• a thermally sprayed film formed on the anodic oxide coating and adhering to the anodic oxide coating with an adhesion greater than 40 MPa,
• wherein said anodic oxide coating includes a surface region in contact with the thermally sprayed film and an interior region having a porosity less than the surface region.

A plasma treatment apparatus comprising:

• a plasma treatment container;
• a plasma treatment container internal member disposed in the plasma treatment container;
• a plurality of gas discharge openings through which a processing gas is supplied to the plasma treatment container;
• and
• an electrode disposed in the plasma treatment container, wherein an object to be treated is adsorbed to be held on an upper surface of the electrode through an electrostatic chuck,
• wherein the plasma treatment container internal member includes;
• a base material;
• an anodic oxide coating formed on a surface of the base material by an anodic oxidation treatment which includes immersing the base material in an alkaline organic electrolyte and performing a plasma discharge in the alkaline organic electrolyte;
• and
• a thermally sprayed film formed on the anodic oxide coating,
• wherein the thermally sprayed film is adhered to the anodic oxide coating with an adhesion greater than 40 MPa.

A plasma treatment apparatus comprising:

• a plasma treatment container;
• a plasma treatment container internal member disposed in the plasma treatment container;
• a plurality of gas discharge openings through which a processing gas is supplied to the plasma treatment container;
• and
• an electrode disposed in the plasma treatment container, wherein an object to be treated is adsorbed to be held on an upper surface of the electrode through an electrostatic chuck,
• wherein the plasma treatment container internal member includes;
• a base material;
• an anodic oxide coating formed on a surface of the base material by an anodic oxidation treatment which includes immersing the base material in an alkaline organic electrolyte and performing a plasma discharge in the alkaline organic electrolyte;
• and
• a thermally sprayed film formed on the anodic oxide coating,
• wherein the anodic oxide coating includes a barrier layer, a low porosity ceramic layer and a high porosity ceramic layer, the low porosity ceramic layer and the high porosity ceramic layer being formed on the barrier layer, and
• wherein the thermally sprayed film is adhered to the anodic oxide coating with an adhesion greater than 40 MPa.