Method of formation of nanowires and method of manufacture of associated optical component
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsDelphine Neel, Pierre Ferret, Stéphane Getin
Life of this patent
Estimating the term…
Abstract
A method of formation of nanowires at a surface of a substrate attached to a solid immersion lens. The method includes formation of a catalyst element at the surface of the substrate and growth of nanowires from the catalyst element formed at the surface of the substrate. The catalyst element is a metal nanoparticle and the formation of the catalyst element at the surface of the substrate deposits the metal nanoparticle using a light beam focused by the solid immersion lens at the surface of the substrate.
Claims11
A method of formation of nanowires at a surface of a substrate attached to a flat face of a solid immersion lens, the method comprising:
- forming at least one catalyst element at the surface of the substrate;
- and
- growing nanowires from each catalyst element formed at the surface of the substrate, wherein, with the catalyst element being a metal nanoparticle and with the substrate being transparent at an operating wavelength,
- the forming the catalyst element at the surface of the substrate includes:
- bringing the substrate into contact with a fluid placed in a tank that contains metal nanoparticles;
- focusing a light beam at the operating wavelength in an area of the substrate, using an incident light beam on a hemispherical face of the solid immersion lens;
- moving the tank until a metal nanoparticle is trapped in the focused light beam;
- and
- attaching the trapped metal nanoparticle on the substrate.
Dependencies are inferred from the claim text.