Semiconductor device and fabrication process thereof

A method for fabricating a semiconductor device, said semiconductor device comprising a semiconductor substrate formed with an active element, an oxidation resistant film formed over said semiconductor substrate so as to cover said active element, a first interlayer insulation film formed over said oxidation resistant film, a ferroelectric capacitor formed over said first interlayer insulation film and having a construction of consecutively stacking a lower electrode, a ferroelectric film and an upper electrode;

• and a second interlayer insulation film formed so as to cover said ferroelectric capacitor, said method comprising the steps of:
• forming first and second contact holes in said second interlayer insulation film so as to expose said upper electrode and said lower electrode, respectively;
• forming an opening in said second interlayer insulation film so as to expose said oxidation resistant film such that a hydrogen barrier film covering said ferroelectric capacitor in conformity with a shape of said ferroelectric capacitor under said second interlayer insulation film is exposed at a sidewall of said opening in a state in which said oxidation resistant film is exposed at a bottom of said opening and such that said first interlayer insulation film is exposed at said sidewall of said opening in said state in which said oxidation resistant film is exposed at said bottom of said opening,
• conducting a thermal annealing process in an oxidizing ambient in a state in which said first and second contact holes and said opening are formed in said second interlayer insulation film;
• and
• exposing, after conducting the thermal annealing process, a lower conductive plug underneath said oxidation resistant film by removing said oxidation resistant film exposed at said opening;
• and filling said opening with a conductive plug.