Substrate processing apparatus checking method and storage medium
AssigneeTokyo Electron Limited
InventorTomoya Koizumi
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Abstract
A substrate processing apparatus checking method that can simply and reliably check the transient response characteristics of a substrate processing apparatus. An analyzing apparatus reads and analyzes process data comprised of time-series data on a plurality of parameters relating to a process comprised of a plurality of steps carried out on a substrate by the substrate processing apparatus. The analyzing apparatus extracts data that satisfies predetermined extracting conditions from the process data, and analyzes the extracted data based on predetermined analyzing conditions.
Claims13
A method of checking a substrate processing apparatus in a system comprising at least one substrate processing apparatus and an analyzing apparatus that reads and analyzes process data comprising time-series data on a plurality of parameters relating to a process comprising a plurality of steps carried out on substrates by the substrate processing apparatus, comprising:
- a process data dividing step in which the analyzing apparatus divides the process data for each substrate of the substrates into a plurality of step data corresponding to respective steps of the plurality of steps carried out on a respective substrate by the substrate processing apparatus based on event data indicative of starting points and ending points of the plurality of steps carried out in the process for the respective substrate;
- a first data extracting step in which the analyzing apparatus specifies and extracts, for one substrate of the substrates, step data to be analyzed from the plurality of step data divided in said process data dividing step;
- a second data extracting step in which the analyzing apparatus further specifies and extracts, from the specified and extracted step data for the one substrate, analysis range data, which is time-series data of a part of the specified and extracted step data specified and extracted in said first data extracting step and which satisfies predetermined extracting conditions;
- and
- a data analyzing step in which the analyzing apparatus analyzes the analysis range data specified and extracted in said second extracting step for the one substrate based on predetermined analyzing conditions.
A non-transitory computer-readable storage medium that stores a program for causing a computer to execute a method of checking a substrate processing apparatus in a system comprising at least one substrate processing apparatus and an analyzing apparatus that reads and analyzes process data comprising time-series data on a plurality of parameters relating to a process comprising a plurality of steps carried out on substrates by the substrate processing apparatus, the method comprising:
- a process data dividing step in which the analyzing apparatus divides the process data for each substrate of the substrates into a plurality of step data corresponding to respective steps of the plurality of steps carried out on a respective substrate by the substrate processing apparatus based on event data indicative of starting points and ending points of the plurality of steps carried out in the process for the respective substrate;
- a first data extracting step in which the analyzing apparatus specifies and extracts, for one substrate of the substrates, step data to be analyzed from the plurality of step data divided in said process data dividing step;
- a second data extracting step in which the analyzing apparatus further specifies and extracts, from the specified and extracted step data for the one substrate, analysis range data, which is time-series data of a part of the specified and extracted step data specified and extracted in said first data extracting step and which satisfies predetermined extracting conditions;
- and
- a data analyzing step in which the analyzing apparatus analyzes the analysis range data specified and extracted in said second extracting step for the one substrate based on predetermined analyzing conditions.
Dependencies are inferred from the claim text.