Identification method of data point distribution area on coordinate plane and recording medium

A non-transitory computer-readable recording medium, comprising a program encoded and stored in a computer readable format to cause a computer to perform a method for identifying a data point distribution area on a coordinate plane, the method comprising:

• a representative point selection first step of selecting any one of data points as a first representative point of the data point distribution area on the coordinate plane where data of a data group to be determined are expressed as points, the data group to be determined including plural of the data points including two variables as a pair;
• a representative point selection second step of selecting one of a clockwise direction and a counterclockwise direction as a selection rotation direction, setting the first representative point as an initial reference point, setting any one of directions passing through the initial reference point as an initial representative point selection direction, from among a plurality of initial data point directions passing through the initial reference point and extending toward the data points, selecting the initial data point direction having a smallest angle relative to the initial representative point selection direction in the selection rotation direction when viewed from the initial representative point selection direction, and selecting a data point corresponding to the initial data point direction as a second representative point of the data point distribution area;
• a representative point selection third step of repeating processes including selecting a last representative point as a next reference point, the last representative point being either the second representative point or a representative point selected in this representative point selection third step and being selected last, setting a reference point as a last reference point, the reference point being used in selecting the last representative point, selecting any one of the directions extending in a range between a first direction and a second direction as a next representative point selection direction, the first direction passing through the next reference point and extending toward the last reference point, the second direction being rotated from the first direction in the selection rotation direction by an angle of 180 degrees, from among a plurality of next data point directions passing through the next reference point and extending toward the data points other than the last representative point, selecting the next data point direction having a smallest angle relative to the next representative point selection direction in the selection rotation direction when viewed from the next representative point selection direction, and selecting a next data point corresponding to the next data point direction as a next representative point of the data point distribution area;
• and
• a determination step of determining whether there is an overlapping area where a distribution representative point area overlaps a determination area the distribution representative point area being defined by connecting the representative points with lines, the determination area being a specific area set on the coordinate plane, and determining, when determining that there is the overlapping area that the data group to be determined is a relevant data group.

A method performed by a computer executing a program of instructions embodied in non-transitory computer readable media, to determine defective chips on a wafer, the method comprising:

• a representative point selection first step of selecting any one of data points as a first representative point of a data point distribution area on a coordinate plane on a surface of the wafer, where data of a data group to be determined are expressed as points, the data group to be determined including plural of the data points including two variables as a pair;
• a representative point selection second step of selecting one of a clockwise direction and a counterclockwise direction as a selection rotation direction, setting the first representative point as an initial reference point, setting any one of directions passing through the initial reference point as an initial representative point selection direction, from among a plurality of initial data point directions passing through the initial reference point and extending toward the data points, selecting the initial data point direction having a smallest angle relative to the initial representative point selection direction in the selection rotation direction when viewed from the initial representative point selection direction, and selecting a data point corresponding to the initial data point direction as a second representative point of the data point distribution area;
• a representative point selection third step of repeating processes including selecting a last representative point as a next reference point, the last representative point being either the second representative point or a representative point selected in this representative point selection third step and being selected last, setting a reference point as a last reference point, the reference point being used in selecting the last representative point, selecting any one of the directions extending in a range between a first direction and a second direction as a next representative point selection direction, the first direction passing through the next reference point and extending toward the last reference point, the second direction being rotated from the first direction in the selection rotation direction by an angle of 180 degrees, from among a plurality of next data point directions passing through the next reference point and extending toward the data points other than the last representative point, selecting the next data point direction having a smallest angle relative to the next representative point selection direction in the selection rotation direction when viewed from the next representative point selection direction, and selecting a next data point corresponding to the next data point direction as a next representative point of the data point distribution area;
• a determination step of determining whether there is an overlapping area where a distribution representative point area overlaps a determination area, the distribution representative point area being defined by connecting the representative points with lines, the determination area being a specific area set on the coordinate plane;
• and
• employing, in a case that the determination step determines that there is the overlapping area, the distribution representative point area in the process to determine defective chips on the wafer.