Apparatus and method for cleaning substrates/media disks
AssigneeInvenpro (M) Sdn. Bhd.
InventorsKae Jeng Ng, Kien Hui Liang, Kien Yew Liang
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AssigneeInvenpro (M) Sdn. Bhd.
InventorsKae Jeng Ng, Kien Hui Liang, Kien Yew Liang
Estimating the term…
An apparatus and method for cleaning workpieces (5) using two pairs of substantially vertical rotating roller brushes (15) at each brush station whereby rotation of said brushes (15) propel workpieces (5) from one brush station to the next. Workpieces (5) are held for a predetermined period of time at each station by edgewheels (30, 31) which also rotate the workpieces (5). Cleaning fluid is sprayed onto workpieces (5) as they rotate to assist in removing particulate contamination. Method involves inserting a single workpiece (5) in between two pairs of rotating roller brushes (15) which scrub said workpiece as it is rotated by a pair of edgewheels (30, 31). There may be a divider shield (9) in between each brush station to prevent a large proportion of particulate matter and use cleaning fluid from traveling between the brush stations.
A method of cleaning a workpiece comprising the following steps:
A method of cleaning a workpiece using a plurality of brush stations comprising:
Dependencies are inferred from the claim text.