Substrate storage container
AssigneeMiraial Co., Ltd.
InventorShuichi Inoue
Life of this patent
Estimating the term…
Abstract
When a lid (20) is attached to a substrate removal/insertion opening (2) in a container body (1), a placement piece forcible displacement means (22) forcibly moves a substrate placement piece (4), which is provided in a region in the vicinity of the substrate removal/insertion opening (2), to a displacement position which does not overlap with a disc-shaped substrate (W). Thus, even if the disc-shaped substrate (W) is increased in diameter, there is no risk of the stored disc-shaped substrate (W) coming into contact with the substrate placement piece (4) due to factors such as vibration or impact, thus the disc-shaped substrate (W) can be stored more safely.
Claims4
A substrate storage container comprising:
- a container main body that stores a plurality of disc-shaped substrates in a parallel manner;
- a substrate transfer opening that is formed in the container main body in order to transfer the disc-shaped substrates in the container main body;
- a lid body that is attached in a detachable manner to the substrate transfer opening from outside in order to seal the substrate transfer opening;
- a back side supporting portion that positions and holds each of the disc-shaped substrates in a back side area inside of the container main body as seen from the substrate transfer opening;
- a lid side retainer that is provided at an inner wall portion of the lid body and that positions and holds each of the disc-shaped substrates;
- and
- a substrate placement piece on which the disc-shaped substrate is placed at an area proximal to the substrate transfer opening, when the lid body is not attached to the substrate transfer opening,
- wherein the substrate placement piece is provided so as to be movable between a supporting position overlapping with the disc-shaped substrate, as seen from a vertical direction with respect to a surface of the disc-shaped substrate, and enabling the disc-shaped substrate to be placed thereon, and a retracted position not overlapping with the disc-shaped substrate, and
- wherein the substrate storage container further comprises:
- a placement piece forced retraction means that forcibly moves the substrate placement piece to the retracted position accompanying the lid body being attached to the substrate transfer opening;
- and
- a placement piece return means that causes the substrate placement piece to return to the supporting position when the lid body enters a state not attached to the substrate transfer opening.
Dependencies are inferred from the claim text.