Micro-electromechanical systems (MEMS) structure
AssigneeSolid State System Co., Ltd.
InventorsChien-Hsing Lee, Tsung-Min Hsieh, Li-Chi Tsao, Jhyy-Cheng Liou
Life of this patent
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Abstract
A MEMS structure includes a substrate, a structural dielectric layer, and a diaphragm. A structural dielectric layer is disposed over the substrate. The diaphragm is held by the structural dielectric layer at a peripheral end. The diaphragm includes multiple trench/ridge rings at a peripheral region surrounding a central region of the diaphragm. A corrugated structure is located at the central region of the diaphragm, surrounded by the trench/indent rings.
Claims20
A micro-electromechanical systems (MEMS) structure, comprising:
- a substrate, having a front side and a back side, wherein the substrate have a predeteimined region;
- a structural dielectric layer, disposed over the front side of the substrate;
- a diaphragm, held by the structural dielectric layer at a peripheral end, wherein the diaphragm is above the substrate corresponding to the predeteimined region and forms a chamber between the substrate and the diaphragm, the chamber is connected to an outer space by multiple through holes in the substrate or in a structure layer on the front side of the substrate, or in both the substrate and the structure layer,
- wherein the diaphragm comprises:
- a plurality of trench/ridge rings at a peripheral region surrounding a central region of the diaphragm;
- and
- a corrugated structure, located at the central region of the diaphragm, surrounded by the trench/ridge rings.
A micro-electromechanical systems (MEMS) structure, comprising:
- a substrate, having a front side and a back side, wherein the substrate have a predetermined region;
- a structural dielectric layer, disposed over the front side of the substrate;
- a diaphragm, held by the structural dielectric layer at a peripheral end, wherein the diaphragm is above the substrate corresponding to the predetermined region and forms a chamber between the substrate and the diaphragm, the chamber is connected to an outer space by multiple through venting holes in the substrate or in a structure layer on the front side of the substrate, or in both the substrate and the structure layer,
- wherein the diaphragm comprises a plurality of trench/ridge rings at a peripheral region surrounding a central region of the diaphragm, and each of the trench/ridge rings is discontinuous and formed by a plurality of trench/ridge segments.
Dependencies are inferred from the claim text.