Differential FET structures for electrical monitoring of overlay
AssigneeInternational Business Machines Corporation
InventorsEmrah Acar, Aditya Bansal, Amith Singhee
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Abstract
A method and apparatus for determining overlay includes an array of electronic devices having structures formed in a plurality of layers and such that a device on a first end of the array includes an offset from a position of a device on a second end of the array. A measurement device is configured to measure electrical characteristics of the devices in the array to determine a transition position between the electrical characteristics. A comparison device is configured to determine an overlay between the layers based on a device associated with the transition position.
Claims8
A method for determining overlay, comprising:
- providing an array of electronic devices having structures formed in a plurality of layers and such that a device on a first end of the array includes an offset from a position of a device on a second end of the array;
- measuring electrical characteristics of the devices in the array to determine a transition position in the electrical characteristics;
- and
- determining an overlay between the layers based on a device associated with the transition position.
Dependencies are inferred from the claim text.