In-situ flux measurement devices, methods, and systems
AssigneeGeorgia Tech Research Corporation
InventorsW. Alan Doolittle, Alexander G. Carver
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Abstract
In-situ flux measurement methods, devices, and systems are provided. According to some embodiments, an in-situ molecular flux device generally comprises a electrically conductive container configured to hold a precursor material, a heat source proximate the electrically conductive container to heat the precursor material to release ions such that an ion current is produced; and a current-measuring device in electrical communication with the electrically conductive container to measure the ion current associated with the heated precursor material. Other embodiments are also claimed and described.
Claims6
An in-situ device to measure flux in a deposition system, the device comprising:
- an electrically conductive container configured to hold a precursor material;
- a heat source proximate the electrically conductive container to heat the precursor material to release ions such that an ion current is produced;
- and
- a current-measuring device in electrical communication with the electrically conductive container to measure the ion current associated with the heated precursor material.
Dependencies are inferred from the claim text.