Jig for detecting position

A position detecting jig for performing a position alignment of a transfer point of a transfer arm which holds and transfers a substrate, the jig comprising:

• an external controller;
• a substrate body transferable by the transfer arm;
• and
• an electrostatic capacitance detecting sensor for detecting an electrostatic capacitance in relation with a reference object for the position alignment,
• wherein the electrostatic capacitance detecting sensor includes:
• a plurality of electrostatic capacitance detecting electrodes, each forming the electrostatic capacitance between the reference object and the electrostatic capacitance detecting electrode;
• and
• a control circuit for controlling a detection of the electrostatic capacitance by each electrostatic capacitance detecting electrode, while communicating with each electrostatic capacitance detecting electrode,
• wherein the electrostatic capacitance detecting electrodes are provided on a rear surface of the substrate body, and the control circuit is provided on a front surface of the substrate body, and
• coordinates (x, y) of the reference object with respect to the substrate body is calculated by said external controller based on a preset relationship between electrostatic capacitance values of multiple electrostatic capacitance detecting electrodes and a position of the reference object with respect to the substrate body.