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US 8,147,618 B2Granted
Device and method for liquid treating disc-like articles
AssigneeLam Research Corporation
InventorThomas Passegger
Life of this patent
Estimating the term…
Abstract
Herein disclosed is a device and a method for liquid treatment of a disc-like article comprising rotating a disc-like article, dispensing liquid onto the disc-like article when rotated, collecting liquid, which is flung off the disc-like article when rotated, providing a plate arranged parallel to the disc-like article and facing the disc-like article when rotated, and directing gas parallel to the plate across the plate.
Claims9
A device for liquid treatment of a disc-like article, comprising:
- a spin chuck for holding and rotating a disc-like article;
- dispensing means for dispensing liquid onto the disc-like article;
- liquid collecting means for collecting the liquid, which is flung off the disc-like article when the disc-like article is rotated;
- a plate arranged parallel to the disc-like article and facing the disc-like article when the disc-like article is held by the spin chuck;
- and
- gas-guide means for directing gas parallel to the plate across the plate from one circumferential edge of the plate to another circumferential edge of the plate,
- wherein the gas-guide means comprises an exhaust for collecting the gas and a gas source for providing the gas, the exhaust and gas source being arrange opposite to each other with respect to a symmetrical plane, which is perpendicular to a plane of the disc-like article when the disc-like article is rotated, and
- wherein the exhaust comprises an exhaust chamber having a shape of a first section of a ring chamber and the gas source comprises a gas source chamber having a shape of a second section of the ring chamber.
5 more elements
A method for liquid treatment of a disc-like article, comprising:
- rotating a disc-like article;
- dispensing liquid onto the disc-like article when the disc-like article is rotated;
- collecting the liquid, which is flung off the disc-like when the disc-like article is rotated;
- providing a plate arranged parallel to the disc-like article and facing the disc-like article when the disc-like article is rotated;
- and
- directing gas parallel to the plate across the plate from one circumferential edge of the plate to another circumferential edge of the plate using gas-guide means,
- wherein the gas-guide means comprises an exhaust for collecting the gas and a gas source for providing the gas, the exhaust and gas source are arranged opposite each other with respect to a symmetric plane, which is perpendicular to a plane of the disc-like article when the disc-like article is rotated, and
- wherein the exhaust comprises an exhaust chamber having a shape of a first section of a ring chamber and the gas source comprises a gas source chamber having a shape of a second section of the ring chamber.
5 more elements
Dependencies are inferred from the claim text.